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Researchers develop novel dual-mode MEMS sensor for wide-range vacuum pressure detection
A research team led by Profs. Chen Deyong and Wang Junbo from the Aerospace Information Research Institute (AIR) of the Chinese Academy of Sciences has developed a novel microsensor that enhances both ...
Semiconductor engineers leveraged manufacturing techniques developed for computer chips to create microscopic MEMS devices. Fabrication methods for MEMS sensors, such as layer deposition, ...
Researchers have developed a sensor array design technology inspired by the human auditory system. By mimicking the human ear's ability to distinguish sounds through tonotopy, this innovative sensor ...
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